The recession took its toll on tech CEOs' compensation in 2009, but not everyone lost. Pay for BMC CEO Robert Beauchamp more than doubled to $26.5 million, for instance, and AT&T CEO Randall Stephenson enjoyed a 35% climb to $20.3 million. Read on to find out more about the salaries, bonus, stock awards and perks that tech CEOs took home last year. Our tallies -- arranged from lowest to highest paid CEO -- are based on data included in public companies' proxy statements (DEF 14A form), as filed with the U.S. Securities and Exchange Commission. For details on how total compensation is calculated, see the last slide.